Atomic Layer Deposition
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Fig. 2
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Atomic layer deposition (ALD) is a vapor phase deposition technique based on self-limiting gas-surface reactions. Layers are grown by sequential cycles of alternating precursors where one layer (monolayer) is grown in one ALD-cycle (Fig.1). Each process is deemed to have a specific temperature window in which ALD behavior (self-limiting growth) is observed with weak or no dependence on temperature (Fig.2). ALD offers uniform depositions with a precise thickness controlle in the Angstrom region and high conformality across m-scale objects.
Contact Person
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Prof. Dr. Sanjay Mathur 430 322b
- Phone
- +49 221 470-4107
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sanjay.mathur
uni-koeln.de